ʻO nā kiʻiʻoniʻoni pale kiʻi Semiconductor photomask i ka pōkole a ke piʻi nei nā kumukūʻai

Ke hoʻomau nei nā ʻoihana hoʻolālā chip, ke koi ʻia nā kiʻi ʻoniʻoni pellicle no nā kaʻina hana lithography Arf a me Krf nohana waferua oi aku i ke kumukuai a ua hoonui.

Ma mua o kēia makahiki, pono e pani ʻo 3M i kāna hale hana ma Belgium e hoʻokō me ka kūlokonā kānāwai mālama kaiapuni, ʻO ka piʻi ʻana o nā kumu kūʻai maka i alakaʻi i nā kumukūʻai kiʻiʻoniʻoni kiʻekiʻe, a ʻo ka hui pū ʻana ma waena o nā mea hana kiʻiʻoniʻoni ʻoniʻoni Iapana ua lohi pū i ka hana ʻana o nā huahana pili a me ka lako paʻa.Eia kekahi, ke hoʻomohala nei kekahi mau mea hana kiʻiʻoniʻoni mask i nā uhi hou no nā nodes kaʻina holomua e like me EUV, ka hopena o ka emi ʻana o ka hana.

Mea hoʻolako kiʻiʻoniʻoni pale kiʻi kiʻi South KoreaFSTmanaʻo ʻia e hoʻonui i ka nui o ka loaʻa kālā hoʻoili mask i kēia makahiki mai 30% i ka makahiki i hala a i 40% i kēia makahiki.